IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision; while offering many capabilities and flexibility not available with traditional microscopes.
The IR-2200 system integrates the infrared table top microscope system with software and 4.1 Megapixel USB-3.0 NIR Camera.
This system provides all necessary features for high precision measurements, image capture, verification and inspection of materials transparent to the near infrared (NIR) / Shortwave Infrared (SWIR) wavelengths.
» Capture from a wide variety of cameras and frame grabbers.
» Control camera parameters like exposure, gain, and gamma from within the application.
» Display user congurable color mapping of up to 16-bit monochrome data.
» Capture single frames to BMP, JPEG, RAW, or TIFF.
» Capture image sequences to AVI or RAW.
» Extensive array of lter options (average, low/high pass, median, laplace, etc.)
» Built in non-uniformity correction
» Full image and ROI histograms and plotting capabilities.
» Optional feature segmentation using thresholding capabilities to extract blobs and other feature types.
» Data export to Microsoft Excel.
» Extensible with support for custom image acquisition drivers, image processing functions, image feature identication ,and custom charts written in C/C++, C#, or VB.NET.
Spectral sensitivity range from 400nm - 1100nm
M. Plan APO Objectives | 2.5X | 5X | 10X | 20X |
Working Distance | 32.0 mm | 35.1 mm | 36.9 mm | 22.0 mm |
Focal Distance | 80.0 mm | 40 mm | 20 mm | 10 mm |
NA | 0.06 | 0.15 | 0.25 | 0.4 |
Resolution | 4.6 um | 1.7 um | 1.2 um | 0.8 um |
Focal Depth | 76.4 um | 10.7 um | 4.4 um | 2.2 um |
Wavelength | 0.4 um - 1.1 um | 0.4 um - 1.1 um | 0.4 um - 1.1 um | 0.4 um - 1.1 um |
** The resolution is calculated as a theoretical resolution based on NA of wavelength 550nm.
Spectral sensitivity range from 900nm - 2000nm
Objectives | 1.0X | 2.5X | 10X | 20X | 50X | 100X | 20X | 50X |
Working Distance | 12 mm | 28.0 mm | 30.7 mm | 12 mm | 10 mm | 10 mm | 10 mm | 10 mm |
Focal Distance | 200 mm | 80 mm | 20 mm | 10 mm | 4 mm | 2 mm | 10 mm | 4 mm |
NA | 0.03 | 0.1 | 0.27 | 0.5 | 0.6 | 0.75 | 0.6 | 0.71 |
Resolution | 18.4 um | 0.3 um | 2.5 um | 1.1 um | 0.9 um | 0.7 um | 1.5 um | 1.2 um |
Focal Depth | 611 um | 55 um | 7.5 um | 2.2 um | 1.5 um | 0.9 um | 2.15 um | 1.58 um |
Wavelength | 0.8 - 1.6 um | 0.45 - 1.6 um | 0.48 - 1.6 um | 0.8 - 1.6 um | 0.9 - 1.6 um | 0.9 - 1.6 um | 1 - 2 um | 1 - 2 um |
** The resolution is calculated as a theoretical resolution based on NA of wavelength 1100nm.
** Last 2 columns resolution is calculated as a theoretical resolution based on NA of wavelength of 1550nm.
Illumination | Koehler illumination |
Turrent | 4 nose manual turret |
Stand | Coarse/Fine Z focus |
Stage | Coarse manual XY stage |
Camera | Cooled Ingas camera Silicon based option for NIR application (740nm-1100nm) |